6 SUN Blade 2500 Workstations
32 SUN Blade 1500 Workstations
4 SUN Blade 150 Workstations

Comsol

CoventorWare
Mentor Graphics
Matlab

INTEGRAM - Metal Nitride Surface Micromachining (MPK)
INTEGRAM - Deep SOI Process (DPK)
INTEGRAM - 2-Layer Polysilicon (PPK)
PolyMUMPS - 3-Layer Polysilicon Surface
SOIMUMPS - SOI
MetalMUMPS - Electroplating
Tronics EpiSOI – epitaxial SOI
IMEPKU - Polysilicon (BETA)
HBSRI - Wafer Dissolved Process (BETA)
SIMIT- Process for capacitive MEMS (BETA)
MicroFabrica - EFAB (BETA)

http://www.memsnet.org/material

Dr. Marc Madou, UCI